华中科技大学主页平台管理系统 WU WEN JIE--英文主页--Paper Publications

伍文杰 Associate professor

伍文杰，男，华中科技大学物理学院副教授，Micromachines 编辑，自然科学基金委函评专家，IOP Trusted Reviewer，IEEE Member，中国微米纳米技术协会高级会员，光电子光子材料与器件学术会议学术委员。近五年作为负责人主持工信部高质量发展专项子课题、国家重点研发计划子课题、自然科学基金面上项目、自然科学基金青年基金、中国博士后特别资助（站中）、中国博士后科学基金等项目，总经费超过700万元。长期从事高端MEMS加速...Detials

Recommended MA Supervisor

Paper Publications Current position: 英文主页 > Scientific Research > Paper Publications

[1] A high-resolution area-change-based capacitive MEMS tilt sensor.Sensors and Actuators, A: Physical,
[2] A method for improving out-of-plane robustness of an area-changed capacitive displacement transducer used in a micro-accelerometer.Sensors and Actuators, A: Physical,
[3] Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer.SENSORS,
[4] Liu Dandan,LIU HUAFENG,LIU JIN QUAN,Fangjing Hu,FAN JI.WU WEN JIE,tuliangcheng.Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer.[J].Sensors,2020,
[5] WU WEN JIE,Zheng Panpan,LIU JIN QUAN,Li Zhu,FAN JI,LIU HUAFENG.tuliangcheng.High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer.[J].Sensors,2017,
[6] WU WEN JIE,LIU JIN QUAN,FAN JI,pengdanhua,LIU HUAFENG.tuliangcheng.A nano-g micromachined seismic sensor for levelling-free measurements.[J].Sensors and Actuators A: Physical,2018,
[7] WU WEN JIE,Liu Dandan,Qiu Wenrui,LIU HUAFENG,Fangjing Hu.HU CHEN YUAN,Fan Ji,Tu Liangcheng.A precise spacing-control method in MEMS packaging for capacitive accelerometer applications.[J].Journal of Micromechanics and Microengineering,2018,
[8] Yan Shitao,Liu Huafeng,Xu Qiangwei,Liu Dandan,Zhang Mengqi.Wu Wenjie,Tu Liangcheng.A method for improving out-of-plane robustness of an area-changedcapacitive displacement transducer used in a micro-accelerometer.[J].Sensors and Actuators A: Physical,2020,(1):
[9] Wu Wenjie,Liu Dandan,Liu Huafeng,Yan Shitao,Tang Shihao,Hu Fangjing,Fan Ji.Tu Liangcheng.Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero- Stiffness Mechanism.[J].Journal of Microelectromechanical Systems,2020,(5):1-10
[10] WU WEN JIE,Zhu Tao,LIU JIN QUAN,FAN JI.tuliangcheng.Polyimide-damage-free, CMOS-compatible Removal of Polymer Residues from Deep Reactive Ion Etching Passivation.[J].Journal of Electronic Materials,2014,(3):

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